| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro structure body, a micro machine having an electric circuit formed on the same substrate so as to control the micro structure body, and a method for manufacturing the micro machine. SOLUTION: A semiconductor element of the electric circuit has a semiconductor layer on a gate electrode. The semiconductor layer of the semiconductor element is composed of a layer containing polycrystalline silicon crystallized on a substrate 101 by heating amorphous silicon or irradiating the amorphous silicon with a laser beam. The obtained layer containing the polycrystalline silicon is used also for a structural layer 108, such as a movable electrode of a structural body 119. Therefore, the electric circuits for controlling the structural body 119 and the structural layer 108 can be formed on the same substrate at the same time. As a result, the micro machine can be made small. In addition, its assembly and package become unnecessary, and its manufacturing cost can be reduced. COPYRIGHT: (C)2008,JPO&INPIT
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