| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid drop delivery method with less dispersion of the number of impinged solid fine particles. SOLUTION: When a time to starting of delivery is shorter than a predetermined time, a step for applying a fine vibration drive pulse signal in which a voltage level is set lower than a delivery drive pulse signal to a pressure generation means 86 to give the fine vibration to a coating liquid in an orifice 71, and thereafter a step for applying the delivery drive pulse signal to the pressure generation means 86 to deliver the liquid drop are performed. When the time to starting of delivery is longer than the predetermined time, a preliminary delivery step, a fine vibration step and a delivery step are performed. COPYRIGHT: (C)2008,JPO&INPIT
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