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发明名称
摘要
申请公布号
JP2007531258(A)
申请公布日期
2007.11.01
申请号
JP20070504451
申请日期
2005.03.25
申请人
发明人
分类号
H01L29/786;H01L21/336;H01L21/8238;H01L27/08;H01L27/092;H01L29/165;H01L29/205;H01L29/26;H01L29/78
主分类号
H01L29/786
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代理人
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地址
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