| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter fixing mechanism needing no periodic fastening operation, and capable of suppressing generation of particles. SOLUTION: A space between an opening frame 1 for hot air passage and a heat resistant filter frame 5 is sealed by direct contact of the heat resistant filter frame 5 to the opening frame 1 for hot air passage. Since the opening frame 1 for hot air passage and the heat resistant filter frame 5 can be completely adhered to each other by comprising a fastening shaft 2 and the heat resistant filter frame 5 by materials with the same coefficient of thermal expansion, necessity of providing a seal member is eliminated. COPYRIGHT: (C)2008,JPO&INPIT
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