| 摘要 |
A method for manufacturing diamond-like carbon (DLC) film is disclosed. The method mainly includes steps of: (a) fixing a substrate in a reaction chamber; (b) pumping the pressure of the reaction chamber below 10<SUP>-6 </SUP>torr; (c) introducing at least a carbon-containing gas into the reaction chamber; and (d) depositing a diamond-like carbon film on the substrate by sputtering a graphite target. The deposited DLC film is in a shape of flakes. The appearance of the deposited DLC film on the surface of the substrate is in a rose-like shape. Moreover, the height of the deposited DLC film is of micrometer level, and the thickness of the deposited DLC film is of nanometer level. Since the aspect ratio of the deposited flake-shaped DLC film is high, the deposited DLC film can enhance the field emission.
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