| 摘要 |
A target for a sputtering source can be subdivided into a plurality of exchangeable target segments ( 9 ). Each target segment ( 9 ) contains coating material, wherein each target segment ( 9 ) borders on at least two adjacent target segments ( 9', 9 ''), wherein each target segment is connectable to a base body ( 2, 13, 15 ) by means of at most one securing means ( 7, 8, 10 ).
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