Encapsulation for Particle Entrapment

摘要

A packaged micromechanical device ( 100 ) having a blocking material ( 116 ) encapsulating debris-generating regions thereof. The blocking material ( 116 ) prevents the generation of debris that could interfere with the operation of the micromechanical device ( 100 ). Debris-generating regions of the device ( 100 ), including debris-creating sidewalls and any debris-harboring cavities, as well as electrical connections ( 108 ) linking the device ( 100 ) to the package substrate ( 102 ) are encapsulated by the blocking material ( 116 ). The blocking material ( 116 ) avoids contact with any debris-intolerant regions ( 118 ) of the device ( 100 ). A package lid ( 122 ), which is glass in the case of many DMD packages, seals the device ( 100 ) in package cavity ( 120 ).