发明名称 Self-aligned biopolar junction transistors
摘要 A plurality of bipolar transistors are formed by forming a common conduction region, a plurality of control regions extending each in an own active areas on the common conduction region, a plurality of silicide protection strips, and at least one control contact region. Silicide regions are formed on the second conduction regions and the control contact region. The second conduction regions may be formed by selectively implanting a first conductivity type dopant areas on a first side of selected silicide protection strips. The control contact region is formed by selectively implanting an opposite conductivity type dopant on a second side of the selected silicide protection strips.
申请公布号 US2007254446(A1) 申请公布日期 2007.11.01
申请号 US20060411311 申请日期 2006.04.26
申请人 PELLIZZER FABIO;BEZ ROBERTO;ZULIANI PAOLA;BENVENUTI AUGUSTO 发明人 PELLIZZER FABIO;BEZ ROBERTO;ZULIANI PAOLA;BENVENUTI AUGUSTO
分类号 H01L29/80;H01L21/331 主分类号 H01L29/80
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