发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a means to jumpingly improve the performance of a semiconductor memory device important in industry, in reference to the constitution of a non-volatile type semiconductor memory device driven at a low voltage by a low power consumption. SOLUTION: The source region, drain region and channel region of an insulating gate electric field effect type transistor are respectively positioned on the surface of a semiconductor provided with a plurality of grooves while an electric charge storage region is provided on the channel region through an insulating layer. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007287990(A) 申请公布日期 2007.11.01
申请号 JP20060114768 申请日期 2006.04.18
申请人 TOHOKU UNIV 发明人 ITO TAKASHI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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