| 摘要 |
PROBLEM TO BE SOLVED: To provide system equipped with measuring head which contains optimum measuring property, while its cross section has the smallest dimensions possible in at least one spatial direction. SOLUTION: This is the system for noncontact measurement of a curved surface 26, comprising (a) light source for generating light with continuous spectrum, (b) light exit surface associated with the light source, (c) measuring head 10 which has light projection system with chromatic aberration for projecting the light exit surface, (d) optical spectrum unit for recording spectral intensity distribution of the light directed to and reflected from the surface measured through optical system 22, and (e) evaluation unit allowing the intensity distribution with distance between the optical system and the surface recorded to be associated with each wavelength having partial maximum value. In the system, surface 26 to be measured is flat in X-direction, light axis of the optical system 22 is perpendicular to the surface 26 in X-direction, where width of the optical system 22 is lessened in this X-direction perpendicular to the light axis 24. COPYRIGHT: (C)2008,JPO&INPIT
|
