| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus which are improved, in order to measure a dimension of a periodic feature on a surface of a sample based on a detection of X-rays scattered from the surface. SOLUTION: The method for X-ray analysis of the sample includes directing of a beam of X-rays to impinge on an area of the periodic feature on the surface of the sample, and receiving the X-rays scattered from the surface in a reflection mode so as to detect a diffraction spectrum in the scattered X-rays as a function of the azimuth. The diffraction spectrum is analyzed in order to determine the dimensions of the structure. COPYRIGHT: (C)2008,JPO&INPIT
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