| 摘要 |
The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat. An electrostatic chuck with a built-in electric heating means comprises a base plate formed of carbon or a carbon-based composite material and, successively formed on one surface of the base plate, an insulating layer (a 1 ), an electroconductive layer (a 2 ) to serve as a chucking electrode and an dielectric layer (a 3 ) to form a workpiece-chucking surface and, successively formed on the other surface of the base plate, an insulating layer (b 1 ) and an electroconductive layer (b 2 ) to serve as an electric heater element, the electrostatic chuck improved in that the workpiece-chucking surface of the electrostatic chuck and an opposite surface thereof are warped to have a relationship selected from concavo-convex and convexo-concave, and in that the warping of the surfaces is in a manner such that the workpiece-chucking surface of the dielectric layer is rendered flat when the opposite surface of the electrostatic chuck is fastened to a machine.
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