VIBRATION SENSOR HAVING A MICROMECHANICALLY PRODUCED VIBRATION STRUCTURE

摘要

The invention relates to a vibration sensor (19) and to a method for producing said type of vibration sensor (19). According to the invention, the vibration sensor (19) comprises at least one first micromechanically produced vibration structure which can be excited by push-like excitation and which comprises a first resonance frequency in the ultrasound range in order to measure the push-like excitation in the most economical and simple way possible.