| 摘要 |
<p>There is provided a plasma reactor having a plasma chamber coupled with a magnetic flux channel. The plasma reactor includes a magnetic core having magnetic flux entrances to face each other and to form a magnetic flux channel, a magnetic flux induction coil wound around the magnetic core to form the magnetic flux channel between magnetic flux entrances, and a plasma chamber having a hollow region, coupled with a magnetic flux channel, in which plasma discharge is generated. The surfaces of the magnetic flux entrance of the magnetic core are positioned over the hollow region of the plasma chamber so that the plasma generated in the hollow regions is uniform and the loss of magnetic flux is small. Therefore, transmission efficiency of inductively coupled energy is high. Moreover, in the structure additionally serving as the capacitive coupling method, ion energy of plasma can be easily adjusted, and excellent expansibility exhibits.</p> |
