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发明名称
APPARATUS FOR MULTIPLE BEAM DEFLECTION AND INTENSITY STABILIZATION
摘要
申请公布号
EP1671353(A4)
申请公布日期
2007.10.31
申请号
EP20040784504
申请日期
2004.09.20
申请人
APPLIED MATERIALS, INC.
发明人
ALLEN, PAUL, C.;WICKSTROM, ALAN, J.;BOLT, BRYAN, C.
分类号
G02F1/11;G01J1/42;G01J5/02;G02B26/00;G02B26/08;G02B26/12;G02F1/29;G02F1/33;G03F7/20;H01L
主分类号
G02F1/11
代理机构
代理人
主权项
地址
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