| 摘要 |
A movable stage system (10) for in a lithographic projection apparatus (1), at least comprising: a base (12); a platform (11) movable with respect to the base; a balance mass object (13,14) movable with respect to the base, for compensating forces generated by movements of the platform; and a drive mechanism (15-19) arranged for moving the platform and the balance mass objects with respect to the base; which drive mechanism comprises: at least one belt transmission (15-17,151-152) which couples said platform and said balance mass object, such that when said platform is moved in a moving direction (20), the balance mass object is moved in an at least partially opposite moving direction (21,22); and a driving device (19) which mechanically engages on at least one of the balance mass object or the platform, for directly driving the platform and the balance mass object. <IMAGE> |
