APPARATUS FOR INSPECTING GLASS SUBSTRATE

摘要

A substrate inspection apparatus is provided to inspect various defects of a substrate by installing a lens between a light source and a reflection unit. An apparatus for inspecting a substrate comprises a light source(110), a reflection unit(120), a light collecting unit(130), a scattering unit(140) and a lens(150). The light source(110) primarily emits light. The reflection unit(120) changes path of the light toward a target substrate. The light collecting unit(130) collects the light reflected from the reflection unit(120). The scattering unit(140) is installed in parallel to the light collecting unit(130). The lens(150) is interposed between the light source(110) and the reflection unit(120) to adjust an emission area and illumination of the light source(110).