| 摘要 |
A method of forming a cathode of an organic light emitting device is provided to evaporate the cathode at a high speed without damaging a hole injection layer, a hole transfer layer, a light emitting layer, an electron injection layer, and an electron transfer layer which are already laminated on a substrate. In a method of forming a cathode(27) of an organic light emitting device(1) in which an anode(21), a hole injection layer(22), a hole transfer layer(23), a light emitting layer(24), an electron transfer layer(25) and an electron injection layer(26) are sequentially laminated on a glass substrate(20), the cathode is evaporated by being separated into a buffer layer(27a) and a pattern layer(27b). The buffer layer is evaporated at relatively lower speed than the pattern layer. The buffer layer is formed by a thermal evaporation method, and the pattern layer is formed by an e-beam or sputtering evaporation method. |
