Inductively coupled plasma reactor with multiple magnetic cores

摘要

There is provided an inductively coupled plasma reactor (10). The inductively coupled plasma reactor is connected to a transformer (60) with multiple magnetic cores (41) and a primary winding (42), to transfer an electromotive force for plasma discharge to a plasma discharge chamber (21) of a reactor body. Parts of magnetic core positioned in side the plasma discharge chamber are protected by being entirely covered by a core protecting tube (45). The primary winding is electrically connected to a power supply source providing radio frequency power. In the inductively coupled plasma reactor, since a number of magnetic core cross sectional parts are positioned inside the plasma discharge chamber, the efficiency of transferring the inductively coupled energy to be connected with plasma is very high.