发明名称 |
Lubricant-free vacuum pump used as a turbo molecular pump comprises a gas bearing surface facing a shaft and/or a gas bearing rotor and having a hard layer |
摘要 |
Lubricant-free vacuum pump (1) comprises a gas bearing surface facing a shaft (4) and/or a gas bearing rotor and having a hard layer with a layer thickness of 0.5-30 mu m. The material of the hard layer has a micro-hardness of at least 1000 HK at 0.01 N measuring force. An independent claim is also included for a method for the production of a gas bearing for a vacuum pump. |
申请公布号 |
DE102006020102(A1) |
申请公布日期 |
2007.10.31 |
申请号 |
DE20061020102 |
申请日期 |
2006.04.29 |
申请人 |
LEYBOLD VACUUM GMBH |
发明人 |
BLUMENTHAL, ROLAND;FROITZHEIM, MICHAEL |
分类号 |
F04D29/056;C23C30/00;F04D19/04;F16C32/06 |
主分类号 |
F04D29/056 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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