| 摘要 |
An organic deposition source assembly is provided to deposit uniform organic thin films rapidly without scanning a substrate or deposition sources by placing the deposition sources at edges or lower parts of sides of the substrate. Organic deposition sources(21,22,23,24) receive and heat organic substances. The deposition sources are placed to each edge or lower parts of each side of a substrate(S). The deposition source is a point deposition source or a rotation type deposition source. The rotation type deposition source includes a rotary body, at least two furnaces, and heaters. The organic substances are hosts or dopants.
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