发明名称 |
Plasma tool for production of cold plasma stream including hollow body for feeding process gas, frequency generator and voltage coil useful for treating inner and outer surfaces of components avoids use of air dielectric capacitors |
摘要 |
<p>Plasma tool for production of a cold plasma stream with a plasma nozzle including a hollow body (4) for feeding the process gas, a frequency generator and at least one coil (6) or a coil containing adaptation network for production of a the required voltage. At least one coil of the network is integrated into the plasma nozzle.</p> |
申请公布号 |
DE102006019664(A1) |
申请公布日期 |
2007.10.31 |
申请号 |
DE20061019664 |
申请日期 |
2006.04.27 |
申请人 |
INSTITUT FUER NIEDERTEMPERATUR-PLASMAPHYSIK E.V. AN DER ERNST-MORITZ-ARNDT-UNIVERSITAET GREIFSWALD |
发明人 |
FOEST, RUEDIGER;WELTMANN, KLAUS-DIETER;STIEBER, MANFRED;KINDEL, ECKHARD |
分类号 |
H05H1/34;C23C16/513;C23F4/00 |
主分类号 |
H05H1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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