发明名称 |
DIE EJECTOR SYSTEM USING LINEAR MOTOR |
摘要 |
<p>The invention provides a die ejector system and method for removing a die from an adhesive surface. The system comprises an ejector tool that is operative to move relative to the die whereby to push the die. The ejector tool may consist of a collet holder and an ejector pin array. A shaft holds the ejector tool and is in turn coupled to a forcer of a linear motor. The forcer is movable relative to a stator of the linear motor. After the die is pushed by the ejector tool, a die pick-up device removes the die from the adhesive surface.</p> |
申请公布号 |
SG136125(A1) |
申请公布日期 |
2007.10.29 |
申请号 |
SG20070065253 |
申请日期 |
2005.03.14 |
申请人 |
ASM TECHNOLOGY SINGAPORE PTE LTD |
发明人 |
GAUNEKAR, AJIT S.;WIDDOWSON, GARY PETER;GANG OU |
分类号 |
B21D45/00;B21D45/02;H01L21/00;H01L21/68 |
主分类号 |
B21D45/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|