| 摘要 |
A plasma reactor having a multi discharge chamber is provided to increase the transfer efficiency of inductively coupled energy coupled to plasma by installing a plurality of magnetic core crossing portions in a plasma discharge chamber. A generator body is prepared in which a plurality of individual plasma discharge chambers are included. A transformer(40) includes a magnetic core and a primary winding crossing the plasma discharge chamber. A part of the magnetic core positioned in the plasma discharge chamber is surrounded and protected by a core protection tube. A power supplying source is connected to the primary winding. The current of the primary winding is driven by the power supplying source. The driving current of the primary winding induces an AC potential that completes a secondary circuit of the transformer and forms inductively coupled plasma. A multi discharge chamber is formed in the plasma discharge chamber to make the inductively coupled plasma surround the outside of the core protection tube. A gas inlet is connected to at least one plasma discharge chamber, and a gas outlet is connected to at least one plasma discharge chamber. Two plasma discharge chambers can be interconnected by an interconnection path.
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