| 摘要 |
A micropositioner is provided, which contains an outer magnetic pole-piece and an inner magnetic pole-piece located within the outer magnetic pole piece. At least one permanent magnet is located between the inner magnetic pole piece and the outer magnetic pole-piece. At least one coil is located between the inner magnetic pole-piece and the outer magnetic pole-piece, wherein the at least one coil is capable of directing magnetic flux between the inner magnetic pole-piece and the outer magnetic pole-piece. An outer movable shell is also movably connected to the outer magnetic pole-piece.
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