摘要 |
A temperature control device includes a first heat source, a second heat source configured to heat a controlled object subjected to temperature control, a first temperature detector configured to detect a temperature of heat from the first heat source, a second temperature detector configured to detect a temperature of the controlled object, a heat transfer member configured to transfer heat produced by the first heat source to the controlled object, a heat-transfer-amount changing unit configured to change the amount of heat transferred to the controlled object by the heat transfer member, and a controller configured to control a transfer state of the heat-transfer-amount changing unit on the basis of an output from the first temperature detector and an output from the second temperature detector.
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