| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transport apparatus which facilitates the positioning of a substrate while enabling stable substrate transport. SOLUTION: The substrate transport apparatus is equipped with a substrate floating support portion 5 that floats and transports the substrate 2, a slit shape gap portion 5e consisting a move passage formed along the transport direction of the substrate 2 in the transport way of the substrate floating support portion 5, at least one suction portion 9 which is arranged on a straight line of the transport direction passing along the approximate center of gravity of the substrate 2 and carries out vacuum holding of the lower surface of the substrate 2 floated by the substrate floating support portion 5, and a transport portion 7 movably provided along the slit shape gap portion 5e supporting the suction portion 9 and composing the move passage. COPYRIGHT: (C)2008,JPO&INPIT
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