METHOD FOR MANUFACTURING ELECTROSTATIC ACTUATOR, METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGE HEAD, METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGE APPARATUS, MASK SUBSTRATE, AND METHOD FOR MANUFACTURING MASK SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To propose a method for manufacturing an electrostatic actuator capable of improving the efficiency of a sealing operation of a gap between electrodes, and to provide a mask substrate facilitating the method. SOLUTION: The method comprises a process wherein a through-channel 26 for providing a sealing material 25 blocking the gap 40 from the open air and a plurality of positioning holes 24 are formed in a cavity substrate 20 of a joint body jointed with an electrode substrate 10 having an individual electrode 12 and the cavity substrate 20 having a vibrating plate 22 opposing the individual electrode 12 through the gap 40 and operated by an electrostatic force generated between the individual electrode 12 and it, a process wherein a first mask substrate 60 comprising a silicon substrate and in which an opening 61 and a plurality of pillar-shaped projecting parts 62 are respectively formed at positions corresponding to the through-channel 26 and the positioning holes 24 of the cavity substrate 20, is tightly laminated on the cavity substrate 20 by inserting the pillar-shaped projecting parts 62 into the positioning holes 24 of the cavity substrate 20, and a process wherein a sealing material 25 is piled in the through-channel 26 through the opening 61 of the first mask substrate 60 to seal the gap 40. COPYRIGHT: (C)2008,JPO&INPIT