| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning stage capable of correcting the slippage of a workpiece on an arm member even if the slippage of the workpiece in the horizontalθdirection occurs. SOLUTION: In the positioning stage, a pair of X-axis linear motors 31 and 32 for moving sliders in the X-axis direction are arranged in parallel with each other and a Y-axis linear motor 300 is provided in a bridge member bridged between the sliders of the pair of X-axis linear motors 31 and 32 to perform predetermined treatment to the workpiece 2 by using a tool mounted to the slider of the Y-axis linear motor. The positioning stage is provided with a workpiece conveying means for moving the workpiece 2 in the X-axis direction, while supporting it, to deliver the workpiece 2 outside the stage, and the conveying means is provided with a turning means for turning the workpiece 2 in the horizontalθdirection. COPYRIGHT: (C)2008,JPO&INPIT
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