发明名称 POLISHING DEVICE AND POLISHING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a polishing device capable of easily keeping a balance of a tool holding member which is held freely to swing. SOLUTION: The polishing device is provided with a first base 3, a second base 5 and a third base 7 placed on a horizontal rack 1 freely to be moved in three axial directions crossing one another, a support member 13 provided in the third base 7, the tool holding member 35 rotatably provided in the support member 13, and a polishing tool 14 provided in the tool holding member 35. The support member 13 is provided with a proximity sensor 51 for confirming whether the tool holding member 35 is horizontal or not. A metal fixture 53 detected by the proximity sensor 51 is fixed to the tool holding member 35 so as to be positioned on the axis of the proximity sensor 51 when the tool holding member 35 is rotated in relation to the support member 31 and the axial direction of the tool holding member 35 becomes horizontal. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007276081(A) 申请公布日期 2007.10.25
申请号 JP20060108636 申请日期 2006.04.11
申请人 NANO WORKS:KK 发明人 SUZUKI HIROFUMI;ANDO YUKIHIKO;OKINO TADASHI;HIJIKATA YOSHIO;INAGAKI AKINORI
分类号 B24B13/00;B24B1/04;B24B41/04 主分类号 B24B13/00
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