METHOD AND APPARATUS FOR MINUTELY CRUSHING AND SORTING POLYSILICON

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for minutely crushing and sorting polysilicon which can produce the crushed pieces of reproducible polysilicon having defined properties with an improved yield by a related apparatus. SOLUTION: The apparatus and the method for minutely crushing and sorting the polycrystaline polysilicon is provided with a control part which can control the variability of at least crushing one parameter in a crushing apparatus and/or at least one sorting parameter in a sorting apparatus. COPYRIGHT: (C)2008,JPO&INPIT