摘要 |
PROBLEM TO BE SOLVED: To capture at high speed information about a super-resolution image formed in a plurality of directions. SOLUTION: The structured illuminating optical system includes: a space modulation element (2), which generates a diffracted luminous flux for forming an interference fringe (F) on a surface (13a) to be observed; and luminous flux rotating means (4 and 42), which is disposed between the space modulation element (2) and the surface (13a) to be observed, and rotates the diffracted luminous flux, running from the space modulation element (2) to the surface (13a), around a normal line of the surface (13a). COPYRIGHT: (C)2008,JPO&INPIT
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