发明名称 STRUCTURED ILLUMINATING OPTICAL SYSTEM AND STRUCTURED ILLUMINATING MICROSCOPE HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To capture at high speed information about a super-resolution image formed in a plurality of directions. SOLUTION: The structured illuminating optical system includes: a space modulation element (2), which generates a diffracted luminous flux for forming an interference fringe (F) on a surface (13a) to be observed; and luminous flux rotating means (4 and 42), which is disposed between the space modulation element (2) and the surface (13a) to be observed, and rotates the diffracted luminous flux, running from the space modulation element (2) to the surface (13a), around a normal line of the surface (13a). COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007279287(A) 申请公布日期 2007.10.25
申请号 JP20060104045 申请日期 2006.04.05
申请人 NIKON CORP 发明人 OUCHI YUMIKO;OSAWA HISAO
分类号 G02B27/58;G02B21/00 主分类号 G02B27/58
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