发明名称 Optical device and optical module
摘要 A high resistance re-grown layer is disposed around an optical device having a mesa structure. Thus, a mesa portion having a plane direction that appears in etching of a circular main structure is coated with the re-grown layer. Because of this coating, it is possible to reduce the capacitance in this portion as well as to avoid the risk of disconnection with respect to all the wiring directions. The thickness of the re-grown layer can be set to be equal to the thickness of the main structural part. Particularly, when a conductive substrate is used, a substantial reduction effect of parasitic capacitance can be expected from a combination with plural dielectric films.
申请公布号 US2007249109(A1) 申请公布日期 2007.10.25
申请号 US20070785926 申请日期 2007.04.20
申请人 KAMIYAMA HIROYUKI;TOYONAKA TAKASHI 发明人 KAMIYAMA HIROYUKI;TOYONAKA TAKASHI
分类号 H01L21/338;H01L33/06;H01L33/10;H01L33/14;H01L33/30;H01L33/36;H01L33/44;H01L33/62 主分类号 H01L21/338
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