发明名称 METHOD FOR MANUFACTURING PATTERNED THIN-FILM LAYER
摘要 <p>A method for fabricating a thin film pattern layer is provided to reduce the quantity of ink injected into the same receiving space by at least two nozzles by injecting the ink at different rates. A substrate(100) with a plurality of banks(102) is prepared wherein the bank and the substrate define a plurality of receiving spaces(104) in common. Ink including a solvent with a high boiling point is injected into each receiving space by using at least two nozzles(202,204). The ink in each receiving space is solidified to form a thin film pattern layer on the substrate. A process for forming the bank can include the following steps. A photoresist layer is formed on the substrate. The photoresist is exposed by using a photomask having a pattern. The exposed photoresist layer is developed to form a bank made of a photoresist layer.</p>
申请公布号 KR20070104232(A) 申请公布日期 2007.10.25
申请号 KR20070036519 申请日期 2007.04.13
申请人 ICF TECHNOLOGY CO., LTD. 发明人 CHOU CHING YU;WANG YU NING
分类号 H01L21/027 主分类号 H01L21/027
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