发明名称 |
CARRIER-SUPPORTED ORGANOMETALLIC COMPOUND FOR VAPOR-PHASE GROWTH, ITS PRODUCING METHOD, AND CARRIER-SUPPORTED ORGANOMETALLIC COMPOUND FILLING DEVICE FILLED WITH THE COMPOUND |
摘要 |
PROBLEM TO BE SOLVED: To provide: a carrier-supported organometallic compound for vapor-phase growth, capable of stably supplying an organometallic compound at a constant concentration for a long period without depending on the supplying device; a method for producing the same; and a carrier-supported organometallic compound filling device filled with the compound. SOLUTION: The carrier-supported organometallic compound for vapor phase growth is produced by supporting an organometallic compound for vapor phase growth on a carrier being solid at ordinary temperature and inert to the organometallic compound, and then crushing the obtained carrier-supported organometallic compound. The carrier-supported organometallic compound does not contain a carrier-supported organometallic compound having a particle diameter of <0.84 mm. COPYRIGHT: (C)2008,JPO&INPIT
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申请公布号 |
JP2007277703(A) |
申请公布日期 |
2007.10.25 |
申请号 |
JP20070018887 |
申请日期 |
2007.01.30 |
申请人 |
UBE IND LTD |
发明人 |
NOGUCHI HIDETAKA;ISHICHI KOJI;HIRATSUKA TORU;MATSUSHIGE KENJI;YOSHITOMI SUSUMU |
分类号 |
C23C16/448;C07F5/00;H01L21/205 |
主分类号 |
C23C16/448 |
代理机构 |
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主权项 |
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地址 |
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