| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chamber of high accuracy capable of preventing generation of particles. SOLUTION: The vacuum chamber for setting the inside of a predetermined closed space in a vacuum state or an atmospheric state comprises a housing for forming the closed space and a lid to be joined with the housing, an O-ring for sealing the vacuum state in the closed space formed of the housing and the lid, and an elastic body capable of preventing abrasion of joining surfaces of the housing and the lid caused by deformation of the housing and the lid when the vacuum state and the atmospheric state are repeated in the closed space. COPYRIGHT: (C)2008,JPO&INPIT
|
