| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrostatic actuator by which, when selectively performing a predetermined treatment to a silicon substrate using a mask substrate, the adhesion of the silicon substrate with the mask substrate can be enhanced and the treatment can be performed only to a target part, and it is possible to produce a highly reliable electrostatic actuator. SOLUTION: The method for manufacturing an electrostatic actuator has a treatment step for selectively performing a predetermined treatment to a part of a silicon substrate 41. The treatment step comprises an adhesion step for attaching a mask substrate 50 to a silicon substrate 41 by vacuum suction, wherein the mask substrate 50 comprises through-holes for treatment (an electrode taking out hole 51 and a sealing hole 52) in the part corresponding to the treatment part for performing a predetermined treatment and suction cup recesses 53 and 54 for forming a space for maintaining vacuum between the mask substrate and the silicon substrate 41, and a step for performing a predetermined treatment to the silicon substrate 41 through the through-holes for treatment of the mask substrate 50. COPYRIGHT: (C)2008,JPO&INPIT
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