| 摘要 |
Disclosed are an X-ray target having a micro focus size and capable of producing X-rays of high intensity, and apparatuses using such an X-ray target. The X-ray target ( 1 ) has a structure in which a first cap layer ( 21 ), a target layer ( 22 ), and a second cap layer ( 23 ) are successively laminated, wherein the first and second cap layers ( 21 and 23 ) are each composed of a material which is lower in electron beam absorptivity than that of which the target layer ( 22 ) is composed. An X-ray generator using the X-ray target ( 1 ) can generate highly intense and nanofocus (several nm) X-rays ( 17 ). Using the X-ray generator, an X-ray microscope allows obtaining a high resolution transmission image, an X-ray diffraction apparatus allows obtaining an X-ray diffraction image of a very small area, and a fluorescent X-ray analysis apparatus allows making the fluorescent X-ray analysis of a minute area.
|
