DEVICE FOR COLLECTING FLUX OF ELECTROMAGNETIC RADIATION IN THE EXTREME ULTRAVIOLET

摘要

Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source (S), comprising a main, first collector stage (E1), with a concave collector mirror (2) placed in front of the source (S) at a distance of greater than 250 mm and pierced by a central hole (3) and a convex mirror (4) placed behind the concave mirror level with the source and pierced by a central hole (5), and at least a second collector stage (E2) with a concave collector mirror (7) placed in front of the stage (E1) and pierced by a central hole (8) and a convex mirror (9) placed behind the concave mirror.