PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element with an excellent piezoelectric characteristic and a piezoelectric material for configuring a piezoelectric layer of the piezoelectric element.

SOLUTION: The piezoelectric element 100 includes: a substrate 2; a lower electrode 4 formed above the substrate 2; the piezoelectric layer 6 formed above the lower electrode 4; and an upper electrode 7 formed above the piezoelectric layer 6, and the piezoelectric layer 6 comprises a piezoelectric material with the perovskite structure and oriented to (110) in the pseudo-cubic representation.

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