| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate which makes a scribe using laser beams possible even when a shading film is formed on it, a method for parting the substrate, and a display. <P>SOLUTION: The shading film 35 which transmits laser beams 36 and cuts off visible light is formed on the substrate 34. The laser beams 36 are concentrated on the inside of the substrate 34 by a condenser 8 to form modified parts 37. Since the shading film 35 transmits the laser beams 36, the modified parts 37 can be formed without being shaded by the shading film 35. The condenser 8 and the substrate 34 are moved relatively to form the modified parts 37 arranged on a cutting schedule surface 34a. After the modified parts 37 are formed on the cutting schedule surface 34a, the substrate 34 is mounted on an elastic stand, and stress is applied to the modified parts 37 to cut the substrate 34. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
