| 摘要 |
PROBLEM TO BE SOLVED: To provide a support bar which is thin, hardly bent, light and can be sufficiently applied to hold a large-size glass substrate called as the eighth generation. SOLUTION: The support bar 12 for a substrate cassette is arranged in a substrate cassette for housing a plurality of substrates in a plurality of stages in a vertical direction with a horizontal posture so as to suppress bending of the center of each of the substrates. The support bar 12 is provided with an upper plate 14 made of a carbon fiber composite material; a lower plate 16 made of a carbon fiber composite material; and an intermediate member 18 arranged between the upper plate and the lower plate, and made of a material other than the carbon fiber composite material. COPYRIGHT: (C)2008,JPO&INPIT |
