| 摘要 |
PROBLEM TO BE SOLVED: To prevent a device to be exhausted and a rotary vacuum pump from being damaged. SOLUTION: The intake port flange 13a of a turbo-molecular pump 1 is fastened to the flange 16 of a vacuum device with bolts 15. The bolt holes 14 of the intake port flange 13a are elongated ones, and so formed near the peripheral edge of the intake port flange 13a that their longitudinal direction almost match the circumferential tangential direction of the intake port flange 13a. A laminate 30 formed by stacking plate-like members on each other is disposed in the bolt hole 14. If an impact force occurs due to the trouble of the turbo-molecular pump 1, an impact force acting from the intake port flange 13a on the bolts 15 is received by the laminate 30. Since a shearing stress acting on the bolts 15 and a motion energy transmitted to the device side flange 16 can be reduced, the bolts 15 can be prevented from being broken or the device can be prevented from being damaged. COPYRIGHT: (C)2008,JPO&INPIT
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