| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system without disturbing an air current formed in the system. SOLUTION: When both a wafer carrying means 54 in a first carrying device 50 and a wafer carrying means 64 in a second carrying means 60 simultaneously move in the downward direction, an exhaust quantity of exhaust fans 135 to 138 increases by control of a control part 139, and a down flow of cleaning air is strengthened thereby. Turbulence of the air current generated when both the wafer carrying means 54 in the first carrying device 50 and the wafer carrying means 64 in the second carrying device 60 simultaneously move in the downward direction, is absorbed by the down flow strengthened in this way. COPYRIGHT: (C)2008,JPO&INPIT
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