MULTIPLE-CHANNEL FLOW RATIO CONTROLLER

摘要

A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i = 1,..., N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Q_i / Q_T (i = 1,..., N) between individual flow rates Qi (i = 1,..., N) and a total flow rate Q_T at the preselected ratio set points.