| 摘要 |
PROBLEM TO BE SOLVED: To disclose a method of visualizing measured value from the recorded image of a disc-like object of inspection. SOLUTION: The image of the at least one disc-like object of inspection is recorded at first, to generate the large number of measured values. Each of the respective measured values is correlated with a color value. An image, as a result, is generated finally, and the area of bringing the measured value on the disc-like substrate is correlated therein, with the color value selected from a prescribed palette. COPYRIGHT: (C)2008,JPO&INPIT
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