发明名称 PARAMETER CALCULATION PROGRAM AND PARAMETER CALCULATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a parameter calculation program and a parameter calculation method capable of quickly calculating parameter dispersion needed to perform highly accurate Monte Carlo analysis. SOLUTION: A representative parameter matrix represented by a linear sum of m representative characteristic values is calculated, and an error propagation rule is applied to the representative parameter matrix to thereby calculate a parameter dispersion matrix showing a variation of n parameters for reproducing a variation of a plurality of measured data corresponding to each of the m representative characteristic values. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007280123(A) 申请公布日期 2007.10.25
申请号 JP20060106606 申请日期 2006.04.07
申请人 RENESAS TECHNOLOGY CORP 发明人 TANIZAWA MOTOAKI
分类号 G06F17/50;H01L21/8238;H01L27/092;H01L29/00 主分类号 G06F17/50
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