发明名称 Locking device, adjustment mechanism and lithographic apparatus
摘要 A locking device to lock a six degree of freedom positioned body is disclosed. The device has a clamping bushing to clamp against a surface of a bore extending through the body, a clamping ring to expand when subject to a compression force, and a lock actuator configured to cause the force to be applied so that the clamping ring expands against the clamping bushing so as to cause the clamping bushing to be pushed into contact against the surface. An adjustment mechanism to adjust a position of a body is also disclosed. The mechanism has an intermediate body on which the body is mounted and first and second adjustment elements to adjust a position of the intermediate body with respect to a fixed location in first and second directions, respectively, so that adjustment of the intermediate body is effected substantially in a plane defined by the directions.
申请公布号 US2007246785(A1) 申请公布日期 2007.10.25
申请号 US20060407338 申请日期 2006.04.20
申请人 ASML NETHERLANDS B.V. 发明人 KRIJNEN EDWIN EDUARD N.J.
分类号 B25B1/24 主分类号 B25B1/24
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