In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.
申请公布号
WO2007061756(A3)
申请公布日期
2007.10.25
申请号
WO2006US44517
申请日期
2006.11.16
申请人
KIONIX, INC.;ADAMS, SCOTT G.;MILLER, SCOTT A.;SHEN-EPSTEIN, JUNE;EPSTEIN, KEITH
发明人
ADAMS, SCOTT G.;MILLER, SCOTT A.;SHEN-EPSTEIN, JUNE;EPSTEIN, KEITH