发明名称 |
METHOD FOR MANUFACTURING PROBE SHEET |
摘要 |
<p>Provided is a method for manufacturing a probe sheet, by which a needlepoint can be arranged at an accurate prescribed position without troublesome position adjustment of the needlepoint in a connecting operation of each contact with a probe sheet main body. The probe sheet is provided with the probe sheet main body, which has an electrically conducting path and a plurality of contacts formed to protrude from one surface of the probe sheet main body to be connected to the electrically conducting path. The manufacturing method includes a step of forming the contacts on a base by successively depositing a metal material, which is for the contacts, from the needlepoint to the base portion of each contact, by using photolithography technology on the base; a step of forming on the base the probe sheet main body, which is connected with the base portion of each contact held on the base; and a step of separating the contact integrally with the probe sheet main body from the base.</p> |
申请公布号 |
WO2007119636(A1) |
申请公布日期 |
2007.10.25 |
申请号 |
WO2007JP57358 |
申请日期 |
2007.03.27 |
申请人 |
KABUSHIKI KAISHA NIHON MICRONICS;HAMADA, KAZUHITO;AKINIWA, TAKASHI;NARITA, SATOSHI |
发明人 |
HAMADA, KAZUHITO;AKINIWA, TAKASHI;NARITA, SATOSHI |
分类号 |
G01R1/073 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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